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Application materials launch Endura manufacturing system, the memory chip revolution relies on it

Feb 02 67
When it comes to memory chips, it mainly refers to DRAM memory, NAND flash memory and a small amount of NOR flash memory. The memory speed is extremely fast but expensive, and the power can not save data when power is off. NAND, NOR flash memory can save data, and the cost is cheap, but performance, The delay is not comparable to memory.

In addition to these memory chips, the industry is still developing various new generation chips, such as MRAM magnetoresistive memory, ReRAM resistive memory, PCRAM phase change memory (Intel's AoTeng memory is the phase change memory principle), these chips are characterized by At the same time, it combines the advantages of flash memory and memory. It has fast speed, low latency and high reliability. At the same time, power can also save data. However, these three types of chips have the same shortcomings, that is, the capacity is relatively small and manufacturing is difficult.

In order to solve the production problems of the new generation of memory chips, new semiconductor equipment is needed. In this regard, Applied Materials is once again in the forefront of the world. Recently, the company announced the launch of the Endura production platform, including EnduraImpulsePVD for manufacturing PCRAM and ReRAM. And the EnduraCloverPVD two physical vapor deposition equipment for MRAM, the most sophisticated chip manufacturing system ever developed by the company.

Taking EnduraCloverPVD as an example, Applied Materials said it consists of nine wafer processing chambers, all integrated in a vacuum and pure state. This is the industry's first large-scale 300mm MRAM system for mass production. The chamber can deposit 5 different materials, and the MRAM chip requires at least 30 different material deposition operations. Some of the material deposition layers are 500,000 times smaller than human hair, achieving subatomic accuracy and extremely complex manufacturing processes. It is also extremely precise.

The same is true for EnduraImpulsePVD devices that make ReRAM and PCRAM, as well as super-complex, sophisticated semiconductor devices.